Home > Products > lab coating equipment > DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater
DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater
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Product Details
| Condition | New | Type | Powder Coating Booth | |
| Substrate | Other, metallic materials | Coating | Vacuum Coating | |
| Place of Origin | Henan, China | Brand Name | CY | |
| Model Number | CY-600-2HD | Voltage | 220V | |
| Power(W) | 2kw | Dimension(L*W*H) | 1300*660*1200mm | |
| Weight | 160KG | Certification | CE | |
| Warranty | 12 month | After-sales Service Provided | No overseas service provided |
Product Description
DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater
Application of magnetron plasma sputtering coater
CY-600-2HD is a magnetron sputtering system featuring dual target sources:
1) DC source for coating metallic material on one head and
2) RF source for coating non-metallic material on the other head. It is equipped with a film thickness tracker to enable the user to easily monitor the coating progress and also record the data.
Features of magnetron plasma sputtering coater
1.Hinged type cover on top with air spring sport makes target exchange easy
2.Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in
3.touch screen control panel
4.Made in Germany high speed turbo vacuum pump system
Technical of magnetron plasma sputtering coater
| Input Power | 1.220VAC 50/60Hz, single phase 2.2000W (including pump) |
| Source Power | 1.Two sputtering power sources are integrated into one control box |
| 2. DC source: 500W for coating metallic materials | |
| 3.RF source: 600W with automatching for coating non-metallic materials ( Center) | |
| 4.Compact 300 RF source is available at extra cost | |
| Magnetron Sputtering Head | 1.Two 2" Magnetron Sputtering Heads with water cooling jackets are included One is connected to RF power supply for no-conductive materials Another is connected to DC sputtering power source for coating metallic materials |
| 2.Target size requirement: 2" diameter | |
| 3.Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets | |
| 4.One stainless steel and one Al2O3 ceramic targets are included for demo testing | |
5.Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally controlled recirculating water chiller is included for cooling both magnetron sputtering heads | |
6.Customized coater: Two DC head without, RF sputtering, RF head without DC sputering,3 RF head are available upon request | |
| Vacuum Chamber | 1.Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel |
| 2.Observation Window: 100 mm diameter | |
| Sample Holder | 1.Sample holder size: 140mm dia. for. 4" wafer max |
| 2.Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating | |
| 3.The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C | |
| Gas Flow Control | 1.Flow rate: 200 ml/min max. |
| 2.Flow rate is adjustable on the 6" touch screen control panel | |
| Vacuum Pump Station | High speed turbo vacuum pump system is directly installed on the vacuum chamber for max. vacuum level |
Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed | |
Mobile pump station is included and the compact sputtering coater can be put on top of station | |
| Max. vacuum level: 10^-6 torr with chamber baking | |
| Thickness Monitor | One Precision quartz thickness sensor is built into the chamber to monitor coating thickness with accuracy 0.10 Å |
| LED Display Unit outside chamber can: | |
| Input material to be coated according to data base included | |
| Display total thickness coated and coating speed | |
| 5 pcs quartz sensors (consumable) are included | |
| Water cooling is required | |
| Overall Dimensions | L1300mm× W660mm× H1200mm |
| Application Note | In order to remove oxygen from the chamber, suggest you use 5% Hytrogen + 95 % Nitrogen to clan chamber 2-3 times, which can reduce oxygen to below 10 ppm |
| Please use > 5N purity Argon gas for plasma sputtering. Even though 5N purity Ar, usually contain 10- 100 ppm oxygen and H2O | |
| Net Weight | 160 kg |
| Warranty | One years limited warranty with lifetime support |
Pictures of Magnetron Plasma Sputtering Coater
Packaging of Magnetron Plasma Sputtering Coater
PLY WOOD BOX as below picture show. or as customer request.
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Warranty
Main product is 15 month, except wearing parts.
Wearing parts as below:
Door stopper 1 pc, glove 1pair, crucible tongs 1pc, manual book
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.
Contact information
Skype ID: jennyhao8819
Whatsapp/wechat/viber:008615639272359
Tel:0086-0371-55199322
Fax:0086-0371-86036875
Website:
We are always at our service in 24 hours
Contact Us
- Zhengzhou CY Scientific Instrument Co., Ltd.
- Contact nameJibin Wang Chat Now
- Phone86-371-55199322
- Addresscuizhu road, hi-tech zone, Zhengzhou, Henan
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