XP-611Nanopositioning Stages

XP-611Nanopositioning Stages
Key Specifications/Special Features:
Characteristics:
110um travel range
Very compact
Open and closed-loop versions
Built-in high-performance piezo      ceramic
Fast scanning and settling
Applications:
Scanning systems
Mechanical engineering,      micromachining
Fiber positioning,laser optics
Macromanipulation,fiber-alignment
Optics, photoelectron
Technical Data:
Types:      XP-611.XYZ100S,XP-611.XYZ100K
Active axes: X,Y,Z
Travel range(0~150V): 110/axis      um±20%
Integrated sensor: SGS
Open/closed-loop      resolution(16bit): 4/7nm
Open/closed-loop      resolution(24bit): 0.2/2nm
Linearity, closed-loop: 0.2%F.S.
Repeatability: 0.05 %F.S.
Stiffness in motion direction:      0.7N/um
Max. load: 600g
Electrical capacitance: 1.8/axis      uF±20%
Unloaded response frequency:      250/200/160Hz±20%
Operating temperature range:      -20~80℃
Voltage/sensor connection: LEMO
Mass: 160g±5%
Material: S/Al
Dimensions: 35×35×47mm
Model    XP-611.XYZ100SXP-611.XYZ100K      Units    
 Active axes      X,Y,Z    
 Sensor    SGS/-    
Nominal travel range(0~+120V)     80     μm/axis±20%    
Max. travel range(-20~+150V)     110     μm/axis±20%    
 Resolution     7/4    nm    
Closed-loop linearity       0.2/-      %F.S.    
Repeatability       0.05/-      %F.S.    
Stiffness       0.7    N/μm±20%      
Unloaded resonant frequency        250/200/160    Hz±20%      
 Load capacity      600     g    
Electrical capacitance        1.8    μF/axis±20%    
Material        Steel, Aluminum    
 Weight      160      g±5%    

Cable length     1.5      m±10mm

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