Vertical tubular atmosphere furnace

Vertical tubular furnace atmosphere unique design can be achieved in a vacuum or atmosphere protection under the condition of the rapid rise of the sample cooling, heating, the temperature field is more uniform, vertical structure makes gas emissions more smoothly and furnace body vertical installed on the movable bracket is conducive to the uniformity of furnace temperature in fetching, can vacuum and hydrogen and argon, nitrogen, oxygen, carbon monoxide, gases such as ammonia decomposition gas, &energy-saving equilibrium temperature field, low surface temperature and elevating temperature rate quickly, the advantages of energy saving, especially suitable for thin film growth, electrode testing, oxide crystal growth, rapid annealing experiment needs!

Scope of application:

The vertical tubular atmosphere furnace is mainly used in the laboratories of colleges and universities, industrial and mining enterprises, and in high, medium and low temperature CVD processes, such as the development of carbon nanotubes, crystal silicon substrate coating, diffusion welding of metal materials and heat treatment in vacuum or atmosphere.

Technical parameters:

Product name 1200 degrees vertical tube atmosphere furnace

Product model HZHY1200

Furnace tube size Φ 50 * 1000 mm

The length of temperature zone is 440mm

Constant temperature district

200 mm

Operating temperature 1100℃

The highest temperature is 1200℃

Intelligent temperature control mode 30 section programmable control

The temperature control precision is ±1℃

The temperature control protection has the function of ultra-mild couple breaking protection

Heating rate 0~20℃/ min

Heating element molybdenum alloy heating wire

Working voltage AC 220V single phase 50HZ

Maximum power 3KW

The furnace chamber material USES polycrystalline ceramic fiber, does not lose powder, the material has good thermal insulation performance, high reflectance, the temperature field is balanced, the resistance to heat rise and cold contraction ability is strong

Flange joints are supplied with two stainless steel vacuum flanges, installed pressure gauges and stainless steel globe valves.

Sealing system the furnace tube and flange between the use of silicone o-ring extrusion seal, easy to remove, can be removed repeatedly, good air tightness, can ensure that the 12-hour pressure gauge pointer does not deflection.

True void bipolar vane mechanical pump: 10^-2 torr

Molecular pump set: 10^-5 torr

Gas supply system

The furnace is equipped with a float flowmeter, the customer can control the gas flow rate through the float flowmeter or proton flowmeter.

Furnace tube material

Gas quartz tube

Gas tightness

4.03 x 10-3 pa

Temperature measuring element K thermocouple

Net weight 70 kg

Gas quartz furnace tube, vacuum flange, high temperature gloves, crucible hook, furnace plug

Electrical certification

CE certification

After-sales service

1 year warranty