Home > Products > CVD system > deposition of Carbon and metal Oxide used 1600C CVD tube furnace with three heating zones / cvd tube furnace
deposition of Carbon and metal Oxide used 1600C CVD tube furnace with three heating zones / cvd tube furnace
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Product Details
Brand Name | CYKY | Model Number | CVD -1600X-III-HVC | |
Place of Origin | Henan, China |
Product Description
deposition of Carbon and metal Oxide used 1600C CVD tube furnace with three heating zones / cvd tube furnace
The CVD-1600X-III-HVC series furnace workstation consists of a 1600X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts.
The max. working temperature of this workstation is 1600C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input
the mixed gas into a alumina tube inside the furnace. It is competent for the experiments as CVD, Diffusion and
other thermo-treatments under vacuum status and shielding gas protect.
The perameter specification of the CVD system with three zone tube furnace / CVD furnace System
1600X-III series tube furnace | Casing | Double layer steel casing with air cooling.Built in thermostat to control Cooling running automatically when case > 55C. |
Processing Tube | Material: 99.8 high purity alumina | |
Thermal Block Placement | 2 pieces | |
Power | 7KW | |
Rated Voltage | AC 208-240V Single phase, 50/60Hz | |
Heating Element | MoSi2 Heating element | |
Working Temp. | Max. Heating Temp.: 1200CContinuous Working Temp.: 1500C | |
Heat-up Rate | Heat-up rate: 1~15C/min programmable | |
Heating Zone Length | Total heating zone:600mm (220mm + 200mm + 200mm) This is customized. | |
Temp. Controller | Three precision temperature controllers to control three zones separately. PID automatic control with 30 steps programmable segments. Temperature accuracy: 1C Thermocouple:B type built inside the furnace | |
Vacuum Seal | One pair of stainless steel vacuum flange with:- one mechanical pressure gauge- two needle valves - one KF-40 connector for the high vacuum station. | |
Rated Voltage | AC 208-240V Single Phase, 50/60Hz | |
Dimension | 1100(L) x 450(W) x 670(H), mm | |
High Vacuum Station | Structure | Mobile cart size: 600 (L) x 600 (W) x 700(H), mm Max. Loading: 600 Lbs on top Molecular pump control Panel : LCD digital display |
Working Range | From 1000 mbar to <1E-7 mbar | |
Ultimate Pressure | <1E-8 mbar (without any leaking ) | |
Voltage & Power | 110VAC or 220VAC, 110W | |
Mass Flow Gas Control | Structure | 3 channel MFC Made of 316 stainless steel with gas flow range as below: Controller : 0~500SCCM 3 Channel gas go through a Gas mixing tank: Dia 80X120mm Dimension: 600(L) x 600(W) x 700(H), mm |
Power | 18W | |
Rated Voltage | AC 208-240V, Single phase, 50/60Hz |
Detailed photos of the CVD system with three zones tube furnace
The gas control with Mass Flow Controller:
the gas controll system with Flowmeter controller
The 1200C Split type three zones tube furnace:
Plywood case
Payment: T/T, L/C, Paypal, etc.
Delivery: 2 weeks
How to contact us?
Send your inquiry details in the below for quotation, click " send " now!
Contact Us
- Zhengzhou CY Scientific Instrument Co., Ltd.
- Contact nameJibin Wang Chat Now
- Phone86-371-55199322
- Addresscuizhu road, hi-tech zone, Zhengzhou, Henan
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