MKS 223BD-00001AAB Pressure Sensing Module

I. Overview

The MKS 223BD-00001AAB is a core pressure sensing module specifically designed for industrial automation and precision measurement scenarios. It adopts variable capacitance technology to achieve high-precision capture and conversion of pressure signals. As a key interface connecting physical pressure parameters and control systems, its core function is to convert pressure changes within the range of 0 to 10 Torr (approximately 1.33 mbar) into stable electrical signal output, providing real-time and reliable pressure data support for automation systems.

II. Technical Specifications

(I) Measurement Performance Parameters

Range and Accuracy:

• The measurement range is 0 to 10 Torr (1 Torr ≈ 0.133 mbar), focusing on low-vacuum and micro-pressure measurement scenarios, and adapting to pressure monitoring needs such as cleanroom air flow and vacuum equipment.

• The accuracy reaches 0.5% Full Scale (F.S.), and the annual stability is better than ±0.1% F.S. It can maintain data reliability without frequent calibration during long-term use.

Response and Signal Characteristics:

• The response time is less than 2 milliseconds, which can quickly capture dynamic pressure fluctuations, making it suitable for transient pressure monitoring scenarios such as wind tunnel experiments and engine testing.

• It outputs a standard 0-5 VDC analog signal, which can be directly adapted to mainstream PLC and DCS systems such as the Siemens S7 series and Mitsubishi FX series, without the need for additional signal converters.

• The signal noise is at an industry-leading low level, and combined with the all-metal diaphragm structure, it effectively suppresses the impact of environmental interference on measurement data.

(II) Physical and Environmental Parameters

Appearance and Installation:

• It adopts a compact modular design (specific dimensions are not publicly available; it is presumed to be compatible with standard 35mm guide rail or panel mounting). It is lightweight and can be flexibly installed in narrow spaces such as control cabinets and equipment chambers.

• The pressure interface adopts industrial standard specifications (presumed to be M5 or 1/8"NPT), which is compatible with common pneumatic connection components and has strong installation compatibility.

Environmental Adaptability:

• It has an IP65 protection rating, providing complete dustproof protection and resistance to low-pressure water splashing. It can be directly used in humid and dusty environments such as food processing workshops and outdoor measurement and control equipment.

• The operating temperature range covers -40°C to +85°C, which is far beyond that of conventional industrial sensors (-20°C to +60°C), making it suitable for extreme temperature scenarios such as outdoor equipment in frigid zones and areas around high-temperature reaction kettles.

Mechanical Tolerance:

• The all-metal diaphragm structure has excellent anti-vibration and anti-shock performance, and can withstand a vibration environment of 10-500Hz with an acceleration of 5g, making it suitable for vibration working conditions such as metallurgy and aerospace.

• The diaphragm has strong chemical corrosion resistance and is compatible with common media such as neutral gases and dry air, extending its service life.

(III) Electrical and Compatibility Parameters

Power Supply and Power Consumption:

• It supports a wide voltage input of 11-18 VDC, and is compatible with MKS dedicated power modules or user-defined DC power supply solutions, without the need for additional voltage stabilizing components.

• The standby power consumption is low (presumed to be ≤0.5W), making it suitable for battery-powered portable measurement equipment or low-power automation systems.

Anti-interference Performance:

• It has an ESD protection capability of ±15kV air discharge, complying with the IEC 61000-4-2 standard, and can still output signals stably in strong electromagnetic environments such as semiconductor workshops.

• The signal lines adopt a shielded design, which effectively reduces electromagnetic coupling interference and ensures that the signal-to-noise ratio of the output signal is better than 50dB.

III. Functional Features

(I) High-Precision and Long-Term Stable Measurement

(II) Wide-Range Environmental Adaptability

(III) Low Noise and Fast Response

(IV) Flexible Adaptation and Easy Integration

IV. Application Scenarios

(I) Semiconductor Manufacturing Field

(II) Cleanroom and HVAC Systems

(III) Medical and Scientific Research Equipment

(IV) Aerospace Testing