- ZHENGZHOU CHUANGDA LABORATORY EQUIPMENT CO.,LTD
- Main products: tube furnace, muffle furnace, cvd system, hydraulic press, plasma cleaner, vacuum spin coater, dip coating machine, Ozone cleaner
Home > Products > Laboratory Coating Machine > EZ4 compact vacuum spin coater for 4inch wafer coating with oilless vacuum pump
EZ4 compact vacuum spin coater for 4inch wafer coating with oilless vacuum pump
US$ 1680 - 1750
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1 Set(Min. Order)
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- 10 days
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Product Details
| Place of Origin | China | Model Number | EZ4 |
Product Description
Features
1.Maximum for 4 inch wafer coating
5.Oiless vacuum pump with low noise
2.Matrial:Anodic Oxidation Aluminium Shell,
3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm
4.LCD Panel with Enghlish Instruction Manual Book5.Oiless vacuum pump with low noise
Technical Parameter
| Model No. | EZ4 |
| Chamber Size | 134mm |
| Maximum wafer sample | 4 inch (100mm) |
| Vacuum Chuck | 3 pieces standard vacuum chuck Size: O.D8mm, 15mm,55mm for immediately using ***Customized vacuum chuck is availiable*** |
| Spin Speed | 100~999RPM |
| Spin Control | Programmable control,5 programmable with each 5 steps can restore |
| Spin Resolution | 1 rpm |
| Power supply | AC110-230V, adjustable |
| Dimension | 250*210*200mm |
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- ZHENGZHOU CHUANGDA LABORATORY EQUIPMENT CO.,LTD
- Contact nameKaren Chat Now
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| Laboratory press | ultrasonic processor | Laboratory Coating Machine | plasma cleaner |
| Vacuum Oven |
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