Home > Products > Lab equipments > GSL-1100X-6-S 6" Single Temperature CVD Vacuum Tube Furnace
GSL-1100X-6-S 6" Single Temperature CVD Vacuum Tube Furnace
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Product Details
| Brand Name | SHENYAGNKEJING-W | Place of Origin | Shaanxi, China | |
| Model Number | GSL-1100X-6-S |
Product Description
Introduction:
The 6" single temperature zone CVD vacuum tube furnaceGSL-1100X-6-S is a vacuum tube furnace with 6" inner diameter of the furnace tube. It can grow a variety of thin films on a maximum 5" substrate in different atmospheres.
Features:
1, double shell, with a circulating air cooling system. The furnace body is made of high-purity alumina polycrystalline fiber insulation material, which is environmentally friendly and energy-saving. The housing temperature is <70°C.
2, using stainless steel vacuum seal flange, use double silicone seal ring to seal.
3, with double K-type thermocouple and an additional temperature calibration detection system.
4, using PID controller, you can set 30 paragraphs of heating and cooling procedures.
5, has passed CE certification.
Technical Parameters:
Power supply: AC220V 8KW
Quartz tube: diameter Ø152mm, length 1016mm
Heating element: Ni-Cr-Al resistance wire
Heating area: 600mm
Constant temperature area: 200mm
Working temperature: up to 1100°C, continuous work 400°C-1000°C
Maximum cooling rate: 10°C/min
Thermocouple: Double K
Temperature control accuracy: ±1°C
Vacuum degree: 10-2torr (mechanical pump), 10-5torr (molecular pump)
Armored thermocouple detection port: 1
Vacuum interface: KF40
Size: 1000mm × 680mm × 920mm;
Weight: 250kg
Standard accessories
Quartz tube: 1
Alumina plugging: 2
Installation conditions
This equipment is required to be used at altitudes below 1000m, temperature 25°C±15°C, and humidity 55%Rh±10%Rh.
1, water: no
2, electricity: AC220V 50Hz, must have a good ground
3, gas: If used as a CVD system, you need to bring your own gas source (standard with pagoda joints, can be modified into a double card sleeve joints at their own expense)
4, table: size 1600mm × 600mm × 700mm, load-bearing 300kg or more
5, ventilation device: need
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