FFD-1300 Compound Molecular Pumps

Specifications

   FFD Series Compound Molecular Pumps

1. Operating in any position.
2. High ultimate vacuum degree.
3. High pumping speed.
4. High compression ratio.
5. Low noise.
6. Clean oil-free.
7. Energy saving.
8. Widly used in spectroscopic instruments, electron microscope, leak detector, surface physical and analytical instruments, mass spectrometer, vacuum coating industry, CRT production, semiconsuctor manufacturing, plasma etching, etc;

Main Parameter:            

Type:                                          FFD-800            FFD-1300          FFD1800

Inlet diameter:                        DN160mm         DN200mm        DN250mm

Outlet diameter:                      KF40mm            KF40mm           KF40mm

Pumping speed:                       800L/s               1300L/s           1800L/s

Ultimate pressure:             5x10^-7 Pa (metallic seal);  5x10^-6 Pa (rubber seal)

Compression ratio:                              N₂ : 10⁸ ;  H₂ : 4x10³

Rotating speed of Motor:      36000r/min        24000r/min        24000r/min

Start-up time:                           < 7min                 < 7min              < 7min

Cooling method:                 Water cooled     Water cooled      Water cooled

Cooling water temperature:    < 24 C                < 24 C               < 24 C

Mounting position:                      Any                      Any                    Any