FF-1300 Compound Molecular Pumps

Specifications

FF Series Compound Molecular Pumps

Introduction

1. High ultimate vacuum degree.
2. High pumping speed.
3. High compression ratio.
4. Low noise.
5. Clean oil-free.
6. Energy saving.
7. Widly used in spectroscopic instruments, electron microscope, leak detector, surface physical and analytical instruments, mass spectrometer, vacuum coating industry, CRT production, semiconsuctor manufacturing, plasma etching, etc.

Main Parameter:            

Type:                                           FF-800            FF-1300           FF1800

Inlet diameter:                       DN160mm       DN200mm      DN250mm

Outlet diameter:                     KF40mm          KF40mm         KF40mm

Pumping speed:                      800L/s            1300L/s           1800L/s

Ultimate pressure:                 5x10^-7 Pa (metallic seal);  5x10^-6 Pa (rubber seal)

Compression ratio:                              N₂ : 10⁸ ;  H₂ : 4x10³

Rotating speed of Motor:      36000r/min      24000r/min      24000r/min

Start-up time:                          < 10min            < 10min           < 10min

Cooling method:                    Water cooled    Water cooled    Water cooled

Cooling water consumption:    90L/h              90L/h               90L/h

Cooling water temperature:    < 24 C               < 24 C             < 24 C

Mounting position:                  Vertical             Vertical             Vertical