ceremic coating with color line

ceremic coating with color line

This is a new arc ion plating system specially designed for tool coating. The vacuum chamber is a vertical barrel with a front door.

Vacuum Chamber:

Chamber cover can be disassemble and has a workpiece jig on it. There is a front door on chamber for loading and unloading of workpieces. There is one observation port on the door.

The chamber body and front door are whole water jacket structured and made of stainless steel.

There is a square-shaped flange hole for connection with vacuum system. On barrel bottom,

there are several flanges: one for installation of heater, two for gas supply and one for thermocouple. 

Inside the barrel, there is a stainless neck bush to keep chamber clean. It is easily disassemble and convenient for regular clean.

The chamber is placed on a rectangle chassis which has gas supply system, side water cooling system, cables of system control and power supply. The chassis is made of carbon steel and painted with anti-corrosive paint.

Vacuum Degassing System

Vacuum system consists of following devices to meet requirement of pump down.

Rotary vane vacuum pump

Oil diffusion pump(ODP)

Roots pump

Besides pumps, the system also has valves, connecting popes,cryotrapping and instruments for measurement. Instruments for measurement is a thermocouple and ionization combined pressure gauge with pressure range 10^-3 Pa to 10^-4 Pa. It can switch from thermocouple gauge to ionization gauge automatically.

Gas supply system

Two or three kinds of gases can be inlet into the system for plating. Each inlet has necessary stop valve and control flow controller. Flow range is 0 to 500sccm for each inlet.

Heating System

The system has a tube-shaped heater and connected power

Temperature measurement

Temperature measurement is by thermocouple thermosistor placed inside vacuum chamber. It can detect environment temperature of chamber. For detecting surface temperature of workpiece, customer can choose infrared thermosistor.

Control System

There are two control systems for customer's choice: semi-automatic control or automatic control.

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Titanium Nitride (TiN)

 Titanium Carbonitride (TiCN)

Aluminum Titanium Nitride (AlTiN)

Titanium DiBoride (TiB2)

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Thanks for your kind attention.