vacuum coating equipment

Specification and model

LD-600（A/B）

Remarks

Vacuum Chamber Inner Size

¢500-800×h500-700(mm)

The size can be increased or decreased±10%

Effective coating space

¢400-700×h350-500(mm)

The size can be increased or decreased±10%

Workpiece rotary frame

Rotation +revolution and rotation

Design according to the specific requirement

The layout of the  rotary frame

The top of Vacuum Chamber   downward install

lower ,

upward install,

can instead

Quantity of the hanging rod

4 rotation+8 revolution and  rotation

Can design according to the workpiece quantity

Rotary speed

0-5revolutions/minute（rotation）

speed governor adjust

variable-frequency governor

The maximum size of the workpiece

¢80-120×h350-500(mm)rotation

Hanger quantities and rotation radius

Application

tools coating+ decorative coating

Workpiece material

Metal ,glass, ceramics etc.

Almost all material

Film material

TiN, TiAlN, CrN, TiC, TiCN, etc.

Tools  film ,

Multilayer film , Decorative film

Requirement of production space

5×7m

Leave the space of operation and maintenance

Requirement of capacitance

50Hz 380V 40KVA

Installed capacity  not practical power consumptive

Requirement of cooling water

>=3ton/hour circulating cooling water/ 25°C

Pollutant emission

none

None exhaust gas, wastewater, none scrap

Work noise

<=90decibel

Vacuum air pump

2X-70rough pump+2X-30maintain pump

Roots pump

ZJP-150

Can be increased

Diffusion pump

KT-400

Can replace molecular pump according to the requirement

Ultimate vacuum

Overmatch 6×10^-4Pa

Work vacuum

6.67×10^-3 Pa

Exhaust speed

<20 minutes(atmosphere—work  vacuum)

Normal temperature

Pressure rising rate(leak rate)

<=0.35Pa/h

Vacuum chamber material

304 stainless steel

Rotary frame material

Carbon steel plating

Cathode voltaic arc ion source

6 dynamoelectric striking the arc   indirect cooling

Direct cooling can instead

Target size

¢100×40(mm)

Grid bias power supply

20KW  20KHz Inverter power supply

The power can change according to the capacity

Voltaic arc power supply

6  0-200A electric current  tunable

Vacuum chamber heating power

15-18KW  temperature PID adjust

Control model

Automatic(A)

Manually operation(B)

Automatic control type have hand control

Automatic control system (A)

Industry control

 computer+ PLD+ LCD+ printer

Can control by touch screen