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plasma enhanced chemical vapor deposition equipment PECVD tube furnace
- 200 Set / Sets per Month
- QINGDAO SHANGHAI TIANJIN NINGBO
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Product Details
| Brand Name | CY | Model Number | CY-O1200-60-4CLV-PE | |
| Place of Origin | Henan, China |
Product Description
Plasma enhanced chemical vapor deposition equipment PECVD tube furnace
Featrues of PECVD tube furnace
1.Lower temperature processing compared to conventional CVD.
2.Film stress can be controlled by high/low frequency mixing techniques.
3.Control over stoichiometry via process conditions.
4.Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and
Amorphous silicon (a-Si:H) deposition.
Technical parmaters of PECVD tube furnace
| Plit Tube furnace | Input power: 208 – 240V AC, 1.2kW 1200°C Max. working temperature for < 60 minutes 1100°C Max for continuous heating High purity quartz tube 2"OD x 1.7"ID x 39.4" Length 30 segments programmable precision digital temperature controller 8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C |
| Plasma RF Generator | Output Power:5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power : 208-240VAC, 50/60Hz |
| Vacuum Flange and Fittings | Vacuum flange set is made of stainless steel 304. Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamp, A KF-25 right angle valve, a KF-25 vacuum bellows, a flange Support 1/4 O.D Hose fitting, and a needle valve. Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" Feedthrough and a needle valve. |
| Vacuum Pump | AC 220V 50 Hz 1/2HP 375W 2 Liter /S or 120 liter/m Oil trap (inlet) and exhaust filter (outlet) are installed. Max. vacuum: 10-2 torr |
| Warranty | 12 month (exclusive wearing part) |
Pictures show of PECVD tube furnace
Packaging of PECVD tube furnace
PLY WOOD BOX as below picture show. or as customer request.
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND Etc.
Warranty
Main product is 12 month, except wearing parts
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.
Contact information
Skype ID: jennyhao8819
Whatsapp/wechat/viber:008615639272359
Tel:0086-0371-55199322
Fax:0086-0371-86036875
Website:
We are always at our service in 24 hours
Contact Us
- Zhengzhou CY Scientific Instrument Co., Ltd.
- Contact nameJibin Wang Chat Now
- Phone86-371-55199322
- Addresscuizhu road, hi-tech zone, Zhengzhou, Henan
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