Drum unit silicon oxide plating vacuum coating machine

Model

JYGX-800

JYGX-900

JYGX-1100

JYGX-1300

JYGX-13500

Chamber Size

800×900

1050×1200

1100×1300

1300×1300

1350×1500

Coating Film Type

Optical antireflection film, AR, broadband antireflection, single-point antireflection, optical filter and decorative film

Fixture

4 pieces of arc-shaped fixtures, single arc-shaped plate revolution, 3 pieces of plates planet rotation and revolution, 12 shafts rotation and revolution (horizontal)

Vacuum Chamber Structure

vertical / horizontal (304 stainless steel), vacuum system post positioned

Vacuum System

slide valve pump(rotary pump), roots pump, diffusion pump, maintaining pump (optional: molecular pump, deep cold pump, deep cold system)

Heating System

heated by heating tube, PID control, the max temperature: 350 degrees

Inflation System

mass flow controller & electric magnetic valve

Electric Gun

Electric gun 4 round shaped crucibles and a U shaped crucible, high voltage 4KV-8KV adjustable. Triangle wave, sine-wave and rectangle wave scanning are optional.

Resistance Evaporation Source

2 groups of resistance evaporation source

Ion Source

power 2KW, max anode current 6A. double filaments which increase the attaching force, density and reflective index of film layer (Kerr)

Crystal Film Thickness Controller

crystal film thickness controller SQC-310(America)and PLC make up the fully automatic pumping and E-beam evaporation system.

Ultimate Vacuum

8×10⁴paclean and unloaded

Pump Time

From atmosphere to 5×10³pa less than 15 minutes

Controlling Method

manual, semi-automatic, fully automatic / touching screen & PLC

Remark

Can be designed according to customers request