Thermostat & Thermal Fuse for Semiconductor Heating Jacket System

Thermostat & Thermal Fuse for Semiconductor Heating Jacket System

In semiconductor manufacturing, pipeline temperature stability directly impacts process accuracy and yield. Traditional electric heating tapes rely on electronic temperature control systems, which carry risks of sensorfailure or controller malfunction leading to overheating.The flexible heating blanket integrates dual safety mechanisms (bimetallic thermostat and thermal fuse), specifically designed for semiconductor vacuum pipelines and gas delivery systems, ensuring precise temperature control and absolute overheat protection.

Core Safety Mechanisms

1.Bimetal Thermostat (Primary Protection)

  Operating Principle: When temperature exceeds the set value (120℃/150℃/160℃/180℃/200℃/220℃/260℃), the bimetallic strip snaps to cut off power in a short time.

   Advantage: Independent of electronic systems, self-resetting, preventing continuous heating caused by thermocouple or controller failures.

2.Thermal Fuse (Secondary Protection)

   Fusing Mechanism: If the thermostat fails, the thermal fuse melts at 172℃/229℃/240℃/257℃, permanently disconnecting the circuit.

  Advantage: Irreversible protection compliant with UL/IEC standards, eliminating fire hazards

Technical Specifications & Selection Guide 

Typical Applications

1. Semiconductor Vacuum Pipeline Heating: Prevents gas condensation and ensures vacuum stability.

• 2. CVD/PVD Reaction Chambers: Precise gas preheating control improves thin-film deposition uniformity.

3. Corrosive Gas Delivery Systems: Chemical-resistant design prevents pipeline damage from thermal control failures.

Selection Guide: Choose thermostat and thermal fuse based on pipeline operating temperature.

General-purpose thermostat from PCC:

PCC  PTS-13H  N220

PCC  PBR380V  N120

PCC  PBR380V  N150

PCC  PBR380VP N160

PCC  PBR380VP N180

PCC  PBR380VP N200

T-O-D 36TXHE26  L220C

General-purpose theramal fuse from THERM-O-DISC :

G4A00172C

G4A00229C 

G4A00240C

G4A00257C