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Home > Products > ceramic spare parts > Precision Ceramic Chuck Semiconductor Equipment
Precision Ceramic Chuck Semiconductor Equipment
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Product Details
| Brand Name | ST.CERA | Place of Origin | China | |
| Type | Ceramic Parts | Application | Structure Ceramic | |
| Material | Alumina Ceramic |
Product Description
Formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation. Ceramics can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Product Categories
| ceramic end effector | ceramic spare parts | ceramic tube | ceramic structural parts |
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