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Home > Products > ceramic spare parts > ST.CERA Customized Semiconductor Ceramic Focus Ring
ST.CERA Customized Semiconductor Ceramic Focus Ring
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Product Details
| Brand Name | ST.CERA | Place of Origin | China | |
| Type | Ceramic Parts | Application | Structure Ceramic | |
| Material | Alumina Ceramic |
Product Description
Be made of high-purity (above 99.5%) alumina ceramic, formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
Here is the characteristics of alumina ceramic with different purity.
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Product Categories
| ceramic end effector | ceramic spare parts | ceramic tube | ceramic structural parts |
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