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Vacuum Atmosphere Muffle Furnace (18.7L) ZMF-1200C
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Product Description
Vacuum atmosphere Muffle furnace (18.7L) ZMF-1200C
Main features
○ The series used in semiconductor devices and metal materials heat treatment, and reductive sintering at 1100℃, also, in material carbonization test.
○ Heat insulating materials adopt Alumina fiber inorganic ones, which is formed with vacuum absorption, environmental protecting and energy saving.
○ resistance wire heating,fuzzy PID control, and Temp. control accuracy ±1℃.
○ Furnace body is double air cooling structure to control furnace surface Temp. no more than 60℃ when furnace is heated into max. Temp.
○ Furnace body use super-light high alumina fiber material, with the features of low hot melt, flexible Temp. control and energy saving, etc.
○ Mechanical pump and vacuum unit are optional according to vacuum degree requirement, very suitable for test and small batch production.
Technical Parameters
Power
| · Power rated: 4.2KW (380±10%V)
|
Voltage
| · Voltage rated: AC 380±10%V 50/60Hz
|
Working Temperature
| · Max. Temperature: 1200 °C · Continuous working temperature: ≤1000℃ · Recommended Heating Rate: 15°C /min
|
| · PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple.
|
Thermocouple
| · K type
|
Heating Elements
| · Fe-Cr-Al Alloy doped by Mo
|
Temperature Accuracy | +/- 1 °C |
Dimensions
| · Chamber size(L*D*H): 250x300x250mm(18L) · Furnace size(L*W*H): 720x960x1288mm
|
Cold ultimate vacuum
| ≤100Pa |
Compliance
| · CE Certified |
Contact Us
- Anhui BEQ Equipment Technology Co.Ltd.
Product Categories
| tube furnace | muffle furnace | cvd | pecvd |
| others | 1700°C |
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