Scanning Electron Microscope Eco SEM

Model

DJ-SEM150

Resolution

5nm (30kV, SE Image)

Magnification

30X-150000X

Acceleration voltage

1kV to 30kV (1kV/5kV/10kV/15kV/20kV/30kV -6 step)

Signal Detection

(SEI)-Secondary Electron Image

(BSEI)-Backscattered Electron Image (Option)

* Multi Detector (SE+BSE)

Observation mode

Standard Mode

Charge-up reduction mode

Electron gun

Filament type

Pre centered tungsten filament cartridge

Bias voltage system

Automatic mode

Electron gun alignment

Manual mode

Lens system

Focus Lens

2-stage Electromagnetic Condenser Lens

Objective Lens

1-stage Electromagnetic Objective Lens

Detector type

SE Detector/ BSE Detector

Stage System

Stage Traverse

5-axis System, X, Y-axis : 40mm / R-axis : 360°, Z : 0~35mm/ Tilt-axis : 0~45°

Or automatic control.

Image shift

Image shift X, Y Image Shift (±150um)

Max Sample size

80mm in diameter, 30mm in height

Image Scanning system

(Fast Scan): 320x240 (Scan time: 0.1sec.)

(Slow Scan): 640x480 (Scan time: 3 sec.)

1(Photo Mode 1): 1280x960 (Scan time: 30 sec.)

2(Photo Mode 2): 2560x1920 (Scan time: 60 sec.)

3(Photo Mode 2): 5120x3840 (Scan time: 120 sec.)

Automatic Function

Auto start, Auto focus, Auto Brightness/Contrast

Image format

BMP, JPEG, PNG, TIFF

Data display

Magnification, Detector type, Accelerating Voltage, Vacuum mode, Logo(Text), Date and time, Text marker, scale bar etc.

Vacuum system

Fully Automatic Multi mode
Rotary Pump/100Liters/min
Turbo Molecular Pump/ 70Liters/sec
pump down time: less than 2minutes

Control unit system

Mouse, Keyboard

PC

PC: Desktop
OS: Microsoft Windows 7
CPU: Intel Core TM i5 or High version
Memory/HDD: 4GB / 500GB or High version

USB 2.0

Software function

Image file open, edit, save 
Length, area, angle measuring
parameter initialization, Image capture mode conversion, Archives, Setting (EDS)

Volume

Main Unit-410(W)×660(D)×600(H)mm……1set

Controller: -410(W)×290(D)×520(H)mm……1set
External vacuum pump: -400(W)×160(D)×340(H)mm …1set

Weight

105kg

Equipment environment

Temperature:15℃~30℃
Humidity: 70% or less
Power source: Single phase 100~240V AC, 1KW, 50/60Hz