YAMAHA SMT Spare Part

PHILIPS PART NUMBER ANDDESCRIPTIOM

5322 358 10173 Belt R-Axis Motor drive 

5322 358 10174 Belt, R-Axis Spline

9965 000 09055 Belt, head

5322 358 10276 Belt

9965 000 10373 Pulley

5322 528 81507 Pulley Conveyor

5322 358 31283 Belt

5322 360 10323 Piston Assy (Piston cylinder only for HEAD 1)

5322 360 10206 Piston, Head Up Down Assembly Heads 1-8

5322 360 10481 Piston, Assembly Spline up down

5322 462 10762 Plug 2, assy (lower plug contains items 4,5,11) 

5322 462 11201 Plug assy (plug assy 1-3-5-7)

9965 000 03801 Plug assy (plug assy 2-4-6-8)

5322 532 12547 Seal is located on the lower part of the piston shaft 

5322 532 12545  Chevron seal used in Piston upper and lower plugs. 

Packing, 

5322 532 12546 Chevron seal used in Piston assembly Packing 

5322 532 13169   Packing

5322 530 51347 Packing,  

5322 530 10289 O-ring, plugs

5322 530 51297 O-ring, metal caps

5322 530 10474 O-ring, plastic caps

5322 530 10292 O-ring, inlets

5322 530 10442 O-ring

5322 530 10441 O-ring

5322 502 60165 Screw (M2x3) leaf spring

5322 492 71713 Leaf spring

5322 492 11793 Leaf spring

5322 360 20081 Filter

5322 360 20106 MUFFLER

5322 530 70461 Circlip, shaft

5322 530 70526 CIRCLIP

5322 360 10207 Valve speed select

9965 000 03808 Valve, speed select 

5322 360 10208 Valve up/down

9965 000 03807 Valve, up-down select 

5322 693 11367 Single ejector

9965 000 09042 Ejector, Single 

5322 360 10209 Valve blow-off

5322 281 20202 Single valve

5322 216 04084 Vacuum sensor board

5322 216 04673 Vacuum sensor board

5322 132 00141 Sensor, head down sensing

9965 000 10927 Sensor, head down sensing

5322 132 00036 Sensor Head

5322 132 00132 Sensor W origin

5322 132 00056 Sensor 1-3 (L=1150)

 9965 000 06136 Sensor 1-3 (L=1400) 

5322 130 10079 Sensor Presure

5322 693 11352 Spline assy (Complete spline shaft assy head 1)

5322 693 11199 Spline assy (Complete spline shaft heads 2-8, indicated with “Y” means 40 um accuracy)

5322 693 11539 Topaz Inner spline shaft heads 2-8

5322 693 11542 Inner Spline, 16 micron 

5322 535 10674 Shaft head asyy (shaft head assy head 1-3-5-7 for SF and FNC head)

9965 000 03802 SHAFT NOZZLE HEAD 

5322 535 10676 Shaft head assy (spline shaft assy 2-4-6-8 only for FNC head)

9965 000 10930 Spline Shaft, Even Heads, FNC

9965 000 10928 Spline Shaft, even Heads SF 

9965 000 10929 Spline Shaft, Odd Heads SF and FNC 

9965 000 10928 Spline Shaft, even Heads SF 

9965 000 10929 Spline Shaft, Odd Heads SF and FNC

5322 216 04674 I/O Board for Topaz Xii (BD CNV)

9965 000 11067 I/O Core Board for Topaz Xii (BD)

5322 360 10483 Nozzle assy (nozzle assy heads 2-4-6-8)

5322 360 40523 Cylinder Main Stopper

5322 535 92541 Speed Controller

5322 360 40471 Cylinder sub stopper

5322 360 10205 Cylinder up/down

5322 526 40896 Joint