vacuum coating company for electron device

FOB Price

US$ 60,000 - 120,000 / Set

1 Set(Min. Order)

Port Shanghai
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Product Details

Condition	New	Place of Origin	Shanghai, China
Brand Name	Vakia	Model Number	Optional
Voltage	380V	Power(W)	According to the configuration for the machine
Dimension(LWH)	According to the configuration for the machine	Weight	According to the configuration for the machine
Certification	CE	Warranty	1 year
After-sales Service Provided	Engineers available to service machinery overseas

Product Description

vacuum coating for electron device

1. Summary Technical Parameters:

Model Function	VAKIA -ASC -700	VAKIA -ASC -900	VAKIA -ASC -1000	VAKIA -ASC -1250	VAKIA -ASC -1400	VAKIA -ASC -1600
Vacuum Chamber Inner Size	φ700 *H900 mm	φ900 *H1100 mm	φ1000 *H1200 mm	φ1250 *H1350 mm	φ1400 *H1600 mm	φ1600 *H1800 mm
Power Supply Type	Arc Power Supply, Filament power supply, Pulse Bias Power Supply, Direct Current magnetron power supply, Medium Frequency Magnetron Power Supply, Radio Frequency Magnetron Power Source, Linear Ionization Source
Structure of Vacuum Chamber	Vertical Front Door Structure, Back Pump-out System, Double Water Cooling Chamber
Material of Vacuum Chamber	Superior Stainless Steel Chamber
Ultimate Vacuum	6.0×10 -4 Pa
Pump-out Time(no-load)	From air to 8.0×10 -3 Pa≤15min
Vacuum Acquisition System	Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer's demand)
Coating Style	Cathodic arc coating+magnetron sputtering coating
Kinds of Film	Decoration film(TiN, TiC, ZrN, TiALN, CrN) metal film, reaction film
The Style of Magnetron target	Rectangle magnetron target, cylindrical magnetron target, twin magnetron dual target
Power of magnetron power supply and the number of magnetron target	The appropriate equipment is selected according to demanders'requirements and different techniques
Arc Power Supply	4 or 6 sets	6 or 8 sets	8 or 10 sets	10 or 12 sets	14 or 16 sets	16 or 18 sets
Bias Power Supply	10KW/set	20KW/set	20KW/set	30 KW/set	40KW/set	50KW/set
Work Piece Rotating Stand and Rotating Style	Planetary revolution-autorotation and frequency conversion speed regulation (controlled and adjustable)
Heating temperature of Work Piece	It can be controlled and adjustable when the room temperature is450ºC(PID control)
Process Gas	Three or four process gas flow control and display system,select automatic filling system
Cooling System	Water-cooling circulatory system,cooling water tower or industrial cooling water machine or deep cooling system is also needed(which are supplied by demander)
Control Mode	Automatic and Manual operation modes integrated, touch screen, PLC or computer control
Total Power	40KW	45KW	50 KW	60KW	75KW	90KW
Alarm and Protection	It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock.
Cover Area	W2m×L3m	W2.5m×L3.5m	W3m×L4m	W4m×L5m	W4.5m×L6m	W5m×L7m
Other Technical parameters	Water pressure≥0.2MPa, water temperature≤25ºC, gas pressure0.5-0.8MPa
Remark	Designed flexible and select the appropriate equipment according to demanders'requirements

2. Features:

Cathodic arc deposition together with medium frequency magnetron sputtering, wide range of application
Metal amd alloy coatings, Multi-layer hybrid coatings and compounds coatings, coatings characterized by: High bright fine and smooth, high hardness, wear resistance, corrosion resistance and decorative
IPG, TiN, TiC, TiCN, TiALN, CrN, Cu, DLC can be deposited.

3. Coated Samples:

Contact Us

Shanghai Vakia Coating Technology Co., Ltd.: Contact namevakiash Lin
Chat Now; Phone0086-21-57728812; AddressWorkshop 4, No. 888, Kun'gang Road, Xiaokunshan Town

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vacuum coating company for electron device

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