ILC Continuous Auto Mirror Magnetron Sputtering Coating System

I. Product Characteristic:

Part 1 is the entrance chamber; Part 2 is the entrance buffering chamber; Part 3 is the entrance transferring chamber; Part 4 is the process chamber; Part 5 is the exit transferring chamber; Part 6 is the exit buffering chamber; Part 7 is the exit chamber. Each chamber can be equipped with four cathodes. The high vacuum chamber is separated by plug valve and the car mirror coating could be achieved through the separation of atmosphere.

(1) Equipment type: Vertical continuous magnetron sputtering coating line.

(2) Film uniformity: In area of effective deposit, the uniformity of film thickness is less than or equal to 5%.

(3) Cathode structure: Adopt the MID-frequency twin rotary cathode.

(4) Driving mode: Adopt the small vertical vehicle which is driven by double friction to load the carrier, equip with frequency conversion motor (adjustable).

(5) Control of coating temperature: It can be designed according the any setting; The stability of control is less than or equal to 5 Celsius degree.

(6) Control system: The combination of MCGS and PLC, can achieve the man-machine dialogue and carry out necessary intervention in production process. During operating process, there are alarm indication and error display; The alarm display can indicate the correct operation and troubleshooting for operators.

II. Product Parameters:

(1) Ultimate vacuum: 6× 10-4 PA

(2) Average production cycle: 80~180 sec/frame (According to the product)

(3) Carrier size: Customized upon request

(4) Film uniformity: 5% or -5%.

III.Coated  Samples