Home > Products > Inline magnetron sputtering vacuum coating system > Magnetron Sputtering Coating line
Magnetron Sputtering Coating line
US$ 800,000 - 2,000,000
/ Set
1 Set(Min. Order)
- Shanghai
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Product Details
| Condition | New | Machine Type | Insulating Glass Production Line | |
| Production Capacity | 10 sets per month | Place of Origin | Shanghai, China | |
| Brand Name | VAKIA | Model Number | ILC | |
| Voltage | 380V | Power(W) | 35KW | |
| Dimension(L*W*H) | 20x6x3m | Weight | 20t | |
| Certification | Other, ISO9001:2008 | Warranty | 1 year | |
| After-sales Service Provided | Engineers available to service machinery overseas |
Product Description
Magnetron Sputtering Coating line
coating line
Description:
With high transparency in visible light and effective in frared-insulation LOW-E glass serves the function of transparecy and heat-insulating.Ultraviolet light cannot get through the LE-E glass,which could prevent the color fading of furniture.
(1) Type of equipment: horizontal continuous magnetron sputtering coating line
(2) Uniformity of the film: in the effective deposition area, the film thickness uniformity ≤ 5%
(3) cathode structure design: adopts medium frequency twin rotary cathode, target specifications depending on the product
(4) Transmission mode: adopts the mold of dual-friction drive loaded into the film. The whole production line speed using Variable frequency and motor drive, the speed can be adjusted
(5) coating temperature control: according to customer requirements using different heating methods and temperature stability
(6) Control system: adopts the configuration software and PLC binding mold, can achieve man-machine conversation, can make the necessary timely intervention on the survival process. During the operation of alarm and fault display.
Application:
put radiation glass ,touch screen, building materials,etc
Technical Parameters:
| Model and Technical Parameters of VAKIA-MSC Series Vacuum Magnetron Sputtering Coating Machine | ||||||
| Performance/Model | VAKIA-MSC-700 | VAKIA-MSC-900 | VAKIA-MSC-1000 | VAKIA-MSC-1250 | VAKIA-MSC-1400 | VAKIA-MSC-1600 |
| Size of coating chamber | Ø700*H900mm | Ø900*H1100mm | Ø1000*H1200mm | Ø1250*H1350mm | Ø1400*H1600mm | Ø1600*H1800mm |
| Power supply type | Filament power supply, pulse bias power supply, DC magnetron power supply, intermediate frequency magnetron power supply, radio frequency magnetron power supply, linear ionization source | |||||
| Structure of vacuum chamber | Vertical double door, vertical front door structure, rear air exhaust system | |||||
| Material of vacuum chamber | High-quality stainless steel cavity | |||||
| Limit vacuum | 6.0*10-4Pa | |||||
| Pump-down time (no-load) | Pump the atmosphere to 8.0*10-3>Pa ≤15 minutes | |||||
| Vacuum acquisition system | Diffusion pump or molecular pump + Roots pump + Mechanical pump + Holding pump (the specific model can be configured according to customer requirements) | |||||
| Coating mode | Magnetron sputtering coating | |||||
| Film type | Metal film, reactive film, compound film, multilayer film and semiconductor film | |||||
| Magnetron target type | Rectangular magnetron target, cylindrical magnetron target and twin magnetron targets | |||||
| Magnetron supply power and number of magnetron targets | Select according to different coating process and customer requirements | |||||
| Bias power supply | 10KW/1 unit | 20KW/1 unit | 20KW/1 unit | 30KW/1 unit | 40KW/1 unit | 50KW/1unit |
| Rotating mode of workpiece turntable | Planetary revolution and autorotation, variable frequency speed regulation (controllable and adjustable) | |||||
| Process gas | 3-path or 4-path process gas flow control and display system, selective automatic gassing system | |||||
| Cooling mode | Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers) | |||||
| Control mode | Manual/automatic integration mode, touch screen operation, PLC or computer control | |||||
| Total power | 30KW | 35KW | 40KW | 50KW | 65KW | 80KW |
| Alarm and protection | Alarm water shortage, overcurrent and over-voltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function | |||||
| Equipment area | W2m*L3m | W2.5m*L3.5m | W3m*L4m | W4m*L5m | W4.5m*L6m | W5m*L7m |
| Other technical parameters | Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure: 0.5-0.8MPa | |||||
| Remarks | The specific configuration of coating equipment can be designed according to process requirements of coating products | |||||
Samples:
Contact Us
- Shanghai Vakia Coating Technology Co., Ltd.
- Contact namevakiash Lin Chat Now
- Phone0086-21-57728812
- AddressWorkshop 4, No. 888, Kun'gang Road, Xiaokunshan Town
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