Home > Products > Other Furnaces > Compact tabletop Plasma Cleaner for plasma etcher
Compact tabletop Plasma Cleaner for plasma etcher
US$ 3,000 - 8,500
/ Set
1 Set(Min. Order)
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Product Details
| Condition | New | Place of Origin | Henan, China | |
| Brand Name | kejia | Model Number | EQ-PDC-32G-LD | |
| Feature | Critical Cleaning / Residue Free, Non-Ionic, Non-Toxic, Rust / Corrosion Inhibitor, Sudsing / Foaming | Fuel | Electric | |
| Certification | CE | Use | Other, plasma cleaner | |
| Material | Glass / Ceramic |
Product Description
Specifications
compact and low cost plasma cleaner which is designed to clean and remove nanoscale organic contaminationEQ-PDC-32G is a compact and low cost plasma cleaner which is designed to clean and remove nanoscale organic contamination on wafer upto 2" with air, oxygen, or argon plasma. The rate of organic removal is about 10 nm/min Max. at high RF power. It is an excellent tool to pre-clean single crystal substrate before expitaxial film deposition to the acheive a better quality. If you don't have any experience for plasma surface cleaning, please refer to the articles as the follows:
- McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
- Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
- Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177
SPECIFICATIONS
| Input Power | AC 110V (for operation under AC220V, we provide additional 500W transformer), please select in option bar | ||||||||||||
RF Power |
at three levels:
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Features |
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Plasma Chamber |
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Vacuum Pump and Valve |
Vacuum Pump with Oil Trap, Exhaust Filter -EQ-2XZ is included with pipe for AC220V voltage. (Ultimate total pressure of 30 mTorr. Only one vacuum pump is included in one package)
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Inert gas |
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| Overall dimension | 8.5" H x 10" W x 8" D | ||||||||||||
| Net Weight |
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Zhengzhou Kejia Furnace Co., Ltd.
Tel.: +86-371-67826992
Fax: +86-371-67197091
Mobile No.: +86 18137195603
Skype: tanyawang55
QQ ID: 912950531
Email:export(at)
Contact Us
- Zhengzhou Kejia Furnace Co., Ltd.
- Contact nameLily Li Chat Now
- Phone86-371-67826992
- AddressBeigang Industrial Park, Zhengshang Road, Zhengzhou, Zhengzhou, Henan
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