Zhengzhou CY Scientific Instrument Co., Ltd.: Zhengzhou, Henan, China; Main products: Lab muffle furnace, Tube furnace, CVD system, Plasma Cleaner, Dental zirconia furnace

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Home > Products > vacuum pump > High vacuum turbomolecular vacuum pump for CVD PVD system vacuum measurement system

High vacuum turbomolecular vacuum pump for CVD PVD system vacuum measurement system

FOB Price

USD $15000.00 - $15000.00 / Set

1 Set(Min.Order)

Supply Ability 110 Set / Sets per Month
Port Zhengzhou port etc.
Payment TermsT/T Credit Card

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Product Details

Place of Origin	Henan, China	Brand Name	CYKY
Model Number	turbomolecular vacuum pump	Theory	Vacuum Pump
Structure	Multistage Pump	Usage	Air Pump
Power	Electric	Standard or Nonstandard	Nonstandard
Fuel	Other, electricity	Pressure	High Pressure
Application	Sewage

Product Description

33 L/s Compact Turbo Vacuum Pump System (up to 1E-7 mbar) with Gauge, Ball Valve & SS Bellows

turbomolecular pump

Introduction of turbomolecular pump

World-famous Pfeiffer vacuum station made in Germany consists of diaphragm pump as backing

pump and turbo-molecular pump, with complete accessories,

including vacuum gauge with KF25 port , SS vacuum bellows with KF40 port, & LCD digital display

and ball valve together, right now bring the customer

a plug-and-play system with vacuum range from 1E-3 to 1E-7 mbar, which means the customer just

presses the power switch and then get high vacuum level

in short time at very low noise. It is an ideal tool for most of MTI's tube furnace to achieve high vacuum >10-5 torr.

turbomolecular pump

Technical parameters of turbomolecular pump

turbomolecular pump

Connection

Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge

Vacuum gauge with KF25 port to install to T -tube

Right angle high vacuum valve with KF40 port, which connects between T- vacuum tube and SS vacuum bellows

600 mm length SS vacuum bellows with KF40 port to connect to furnace flange

One KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port on flange

Ultimate Pressure

<7.5E-9Torr (1E-6Pa) without any leaking

Start-up Time

2 Min.

Working Range

From 750Torr to <7.5E-8Torr (1E5Pa ~ <1E-5Pa)

Backing Pump's Pumping Speed

0.9m^3/H (15L/min) at 50Hz and 1.0m^3/H (16.6L/min) at 60Hz

Turbo Pump's Pumping Speed

Nitrogen N2 33 L/s

Helium He 39 L/s ( 2340L/minute)

Hydrogen H2 32 L/s

For customer's reference:
1. Please go to bigger pump HVS-3 for bigger volume over 10L in volume, this pump is too small to vacuum MTI's tube or other chambers over 10L
2. The station's total pumping speed can not be simply equal to the Backing Pump Speed + Turbo Pump Speed, see below table for vacuum rate reference

Time ( Minute(s) )	Pressure (Torr)	Time ( Minute(s)	Pressure (Torr)
0	760 (Atmosphere)	5	1.37 x 10^-2
1	15	6	1.29 x 10^-2
2	2.70 x 10^-2	15	6.7 x 10^-3
3	1.66 x 10^-2	180	1.05 x 10^-5

Current

4A max.

Mains Connection

90-132 V/ 185-265V (Universal)

Weight

15 Kg

Warranty

One year manufacture warranty

More photos of turbomolecular pump

Packaging & Shipping

Our Services

1.One year free warranty.

2.All machines are debugged before shipment.

3.Lifetime technical support and service.

4.24 hours on line or phone or by email technical support.

5.We offer detailed machine manual and software manual.

6.Our factory make a vivid training CD.

7.Life-long free maintenance.

8.Free training in our factory.

Welcome to visit our factory, learn machine face to face.

24-hours online service makes your inquiry be reply immediately.

Contact Us

Zhengzhou CY Scientific Instrument Co., Ltd.: Contact nameJibin Wang
Chat Now; Phone86-371-55199322; Addresscuizhu road, hi-tech zone, Zhengzhou, Henan

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Product Categories

lab ball mill	vacuum pump	vacuum glove box	vacuum furnace
tube furnace	plasma cleaner	New Products	muffle furnace
melting furnace	lab coating equipment	atmosphere furnace	industrial furnace
hydraulic press	high vacuum system	heating element	graphene growth system
flowmeter	dental furnace	CVD system	crucible furnace

High vacuum turbomolecular vacuum pump for CVD PVD system vacuum measurement system

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