Sliding RTP ( rapid thermal processing ) RTP Tube Furnace / CVD graphene tube furnace

Furnace Structure

• Double layer steel structure with dual air cooling fans
• One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side
• Vacuum flanges and a digital vacuum gauge are installed for immediate use.
• Slding rail length is about 1200mm, the furnace can slide 600 mm distance

Power

Max. Temperature

Continuous Temperature

Heating& Cooling Rates

Heating Zone Length

440mm ( single zone )

Constant Temperature Zone

120mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Two foam ceramic blocks are included which must be placed inside tube to avoid heat radiation damaging O-ring

Temperature Controller

• PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Built-in over temperature alarm and protection allows for operation without attendant.

Temperature Accuracy

+/ - 1°C

Vacuum Flanges

• Stainless steel vacuum flanges are installed on both ends of tube with heavy duty support.

Vacuum Level

• Limited by pump ( pump is not included
• 10E-5 torr can be reached by molecular pump
• 10E-2 torr by mechanical pump.

Sliding Rails / Table

• Double sliding rail made by Cr plated steel

• Sliding length: 1200 mm

Dimensions

• 550 x 380 x 520 mm ( furnace only)

• 1500 x 380 x 620 mm ( furnace + sliding )

Net Weight

~ 110 Kg

Shipping Package Size

70" x 45" x 45" (inch)

Shipping Weight

350 lbs

Warranty

One year limited 

Compliance

• CE Certified