Zhengzhou CY Scientific Instrument Co., Ltd.: Zhengzhou, Henan, China; Main products: Lab muffle furnace, Tube furnace, CVD system, Plasma Cleaner, Dental zirconia furnace

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Optional gas mixing system for electric CVD furnace

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USD $200 - $5,600 / Set

1 Set(Min.Order)

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Product Details

Brand Name	CYKY		Model Number	CY gas mixing system
Place of Origin	Henan, China

Laboratory used gas mass flow controller/3 way MFC Gas Mixer for CVD furnace

Application of MFC Gas Mixing System

Gas flow control

1.Semiconductor manufacturing industry

2.Vacuum coating equipment

3.Special material surface treatment

4.Gas combustion control

5.Leakage detection system

6.Environment detection and analysis equipment

7.Chemical, petrochemical, metallurgy, optical fiber and etc

Feature of MFC Gas Mixing System

1.Variety gas way for option

2.304 stainless steel pipe core, corrosion resistance

3.Stainless steel double card quick connector, easy to connect, and no leakage

Technical parameters of MFC Gas Mixing system

Model no.	CY-3Z
Flow meter type	mass flow
Flow meter pipe core material	304 stainless steel
Valve type	electromagnetic regulating valve
Pipeline normal condition	close
Gas way	3 gas way
Connector size	1/4"
Measurement accuracy	±1.0%F.S
Linearity	±0.5%F.S
Repeat accuracy	±0.2%F.S
Pressure range	.-0.1-0.15Mpa
A way range	0-100SCCM
B way range	0-200SCCM
C way range	0-500SCCM
flow control range	2%-100%
Zero temperature drift	0.6F.S(15-35℃)
Respond time	2S
Working temperature	15-50℃
Working power	AC 220V 50-60Hz

Detailed photos of gas mixing system

Zhengzhou CY Scientific Instrument Co., Ltd.: Contact nameJibin Wang
Chat Now; Phone86-371-55199322; Addresscuizhu road, hi-tech zone, Zhengzhou, Henan