Wide range High Tempreture Pressure Transducer

Wide range High Tempreture Pressure Transducer   

1. Parameter

1). Measurement medium : Non-corrosive liquids with silicon, stainless steel, glass,
insulation adhesive or gases
2). Ranges: 0~35kpa……100Mpa
3). Accuracy:  0.3%FS 0.5%FS (Typical)
4). Pressure overload: 150%FS
5). Input / output: impedance 800Ω~5kΩ
6). Stability: 0.2%FS /Year (Typical)
7). Full scale-Output: 80mvdc±20mvdc
8). Zero point output: ≤±2mvdc
9). Power supply 5mADC or 9VDC
10). E-connection: Lock structure or others
11). Temperature:  Coefficient ±0.03%FS/°C (Typical)
12). Operating temperature range -55~200°C;

13). Transient temperature: 2000 °C proofed
(special structure)
14). Compensated temperature range: 25°C~125°C 25°C~175°C
15). Process connection: M20×1.5,M12×1 or Others
16). Housing material: 1Cr18Ni9Ti

2. Feature

Self-developed high temperature piezoresistive pressure MEMS sensor chip
Long time working on 200°C
Wide range, high overload, high frequency response (1MHz)
High sensitivity excellent long-time stability
Wide Temperature Range Compensation
Optional constant current and constant voltage power supply

3. Description
High temperature pressure transducer adopt high-temperature piezoresis- sensitive chip as
sensitive element made by MEMS and SOI(Silicon On Insulator) techniques. The structure of the chip
is especially advanced beam & membrane and pour-cup structure. Using such structure, the transducer
acquired capacity of high temperature, even instantaneous ultra heat shock, dynamic frequency
response, ultra-high range and high overload. “High temperature pressure transducer” is key projects
achievement of MEMS field in 863 Program (National High Technology Research and Development
Program of China), and it has owned proprietary intellectual property rights(patent: ZL 01 1 28782.9
and ZL 00 1.13961.4). This transducer used widely on pressure measurement of high temperature
liquid in territories of aerospace, petrochemical engineering, metallurgy, electricity, shipping,
automobile, medical treatment.

4. Connection

5. Size

6. APPLICATION

Aerospace
Petrochemical
Metallurgy
Research

7. Lectotype giude