Shanghai Jinwei Instrument Manufacturing Co., Ltd.: Shanghai, China; Main products: Hardness tester, Electric furnace, Tensile testing machine, Ultrasonic flaw detector, coating thickness gauge

Home
Product Categories

Bench type hardness tester

Compact muffle furnace

cutting machine

Electric atmosphere furnace

Electric tube furnace

metallographic equipment

Microscope

Mosaic Machine

New Products

Polishing machine

Portable type hardness tester

ultrasonic flaw detector

Universal testing machine
Company Profile

Company Introduction

Photo Gallery
Blog
Quality Control
Contact Us

Home > Products > Electric tube furnace > Mass flow meter mixing gas system for CVD system

Mass flow meter mixing gas system for CVD system

FOB Price

Negotiable / Set

1 Set(Min. Order)

Port Shanghai

Request Sample Customized Request Request Free Catalogs

Contact Now

Get lowest price

Product Details

Brand Name	SIOMM		Model Number	HQZ-3
Place of Origin	Shanghai, China

Product Description

Specifications

1) Mass flow meter mixing gas system for CVD system
2) CE and ISO9001 certificate.
3)1 years warranty

Mass flow meter mixing gas system for CVD system

Product Description

HQ-Z mixed gas system is controlled by the single-channel or multi-channel mass flowmeter to continuous supply the mixed gas.

And can realize precision measurement and control of the gas mass flow;

Each gas pipes are equipped with high-pressure check valve to ensure the system used safety and reliable;

With the features of uniform mixed gas, high precision control, digital display and intuitive and sensitive features.

The high-precision mass flow control system is composed of multi-channel mass flow meter, flow indicator, etc. ,

Achieved the precision measurement and control of gas flow; with high accuracy, fast response, extremely low zero drift and temperature drift, good compatibility and reliable sealing performance features.

Via software to support the interactive interface and easy operation.

Each gas pipeline are equipped with high - pressure check valve to ensure the system safe and reliable;

Detailed Images

Product Uses

For the precision gas flow control of high temperature atmosphere sintering, atmosphere restoring and CVD/CVI experiments.

Specification

Model	HQ-Z (Approved by CE certificate, ensure the safety operation of the machine. Certificate No.: GB/1067/4189/12 Issue 1)
Control mode	D07 - 7K mass flowmeter, of D08 flow indicator
Flow	0-500SCCM/0-1SLM (Customized)
Linear	±0.5%F.S.
Accuracy	±1%F.S.
Repeat accuracy	±1%F.S.
Respond time	≤2sec
Zero drift	<0.6%F.S.
Pressure	3MPa
Gas channel	Multi-routes (Customized)
Mix gas tank	Φ100*300mm
Check valve	Φ6mm
Needle valve	Stainless steel
Pipeline	Φ6mm Stainless steel tube
Interface	SwagelokΦ6mm
Moving workbench	720500850mm

Contact Us

Shanghai Jinwei Instrument Manufacturing Co., Ltd.: Contact nameJack Zhou
Chat Now; Phone0086-021-51696069-8022; AddressNo. 489, Xinhe Rd.

*Email
Please enter Your valid email address.
*To

Jack Zhou
*Message
Your inquiry content must be between 20 to 5000 characters.
Please enter a correct verification code.

Product Categories

Bench type hardness tester	Compact muffle furnace	cutting machine	Electric atmosphere furnace
Electric tube furnace	metallographic equipment	Microscope	Mosaic Machine
New Products	Polishing machine	Portable type hardness tester	ultrasonic flaw detector
Universal testing machine

Mass flow meter mixing gas system for CVD system

You May Like

Product Details

Product Description

Specifications

Contact Us

Product Categories

New Products

Popular Searches

Recommended Products

Find Similar Products By Category